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Control of Discharge Conditions to Reduce Hydrogen Content in Low Z Films Produced with DC Glow
http://hdl.handle.net/10655/2538
http://hdl.handle.net/10655/253883136121-1bcf-4756-8e71-367cac143a56
Item type | 研究報告書 / Research Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2010-02-05 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Control of Discharge Conditions to Reduce Hydrogen Content in Low Z Films Produced with DC Glow | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | DC glow | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | boronization | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | elastic recoil detection | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | hydrogen content | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | H recycling | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | LHD. | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_18ws | |||||
資源タイプ | research report | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
"Natsir, M.
× "Natsir, M.× Sagara, A.× Tsuzuki, K.× Tsuchiya, B.× Hasegawa, Y.× Motojima, O." |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Boronization at near room temperature has been performed in plasma processing teststand (PPT) by using a 5 % diborane gases B_2 H_6 in He on electrically floating or unfloating Al samples under various conditions on DC glow discharge power or total gas pressure. The hydrogen concentration was analyzed by using elastic recoil detection method (ERD) and a new modified normalizing technique with Rutherford back scattering (RBS). Results showed that a high growth rate of film formation and floating surface were effective in reducing hydrogen concentration in B films. This result was in good agreement with earlier measurements of H with flash filament (FF) desorption method. In particular the H/B ratio was reduced by decreasing ions but increasing radicals for B film formation. | |||||
書誌情報 |
en : Research Report NIFS-Series 発行日 1995-09-01 |
|||||
報告書番号 | ||||||
NIFS-373 | ||||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0915-633X |