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Effect of a Magnetic Filter Across the Exit Hole of a Flat Oxygen Plasma Source
http://hdl.handle.net/10655/00013242
http://hdl.handle.net/10655/000132424bda8d02-119d-4993-915a-2def34534cd4
名前 / ファイル | ライセンス | アクション |
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11943_PFR (639.0 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-06-20 | |||||
タイトル | ||||||
タイトル | Effect of a Magnetic Filter Across the Exit Hole of a Flat Oxygen Plasma Source | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | plasma source | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | magnetic filter | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | inductively coupled plasma | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | dissociative electron attachment | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | negative oxygen ion | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | atomic layer deposition | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
KODAMA, Norihiro
× KODAMA, Norihiro× HIMURA, Haruhiko× AZUMA, Kingo× TSUMORI, Katsuyoshi× NAKANO, Haruhisa |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | This study aims to develop a novel flat oxygen plasma source containing a magnetic filter. The aspect ratio of the diameter to the length of the source vessel was approximately four. A pair of small permanent magnets was inserted in a metal flange to generate the magnetic filter at the exit hole of the plasma source. Measured currentvoltage characteristics indicated that a clear decrease in the electron temperature was successfully attained across the magnetic filter, which was adequate for producing negative oxygen ions via dissociative electron attachment. | |||||
書誌情報 |
Plasma and Fusion Research 巻 14, p. 1206088, 発行日 2019-06-03 |
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出版者 | ||||||
出版者 | The Japan Society of Plasma Science and Nuclear Fusion Research | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1880-6821 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12346675 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1585/pfr.14.1206088 | |||||
権利 | ||||||
権利情報 | (c) 2019 The Japan Society of Plasma Science and Nuclear Fusion Research | |||||
関連サイト | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1585/pfr.14.1206088 | |||||
関連名称 | Publisher version | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
NAIS | ||||||
11943 |