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Tungsten-Surface-Structure Dependence of Sputtering Yield for a Noble Gas
http://hdl.handle.net/10655/00013328
http://hdl.handle.net/10655/000133287fa8d6c5-a327-4494-9f4d-c9ee2fe0706f
名前 / ファイル | ライセンス | アクション |
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10225_PFR (4.4 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-07-04 | |||||
タイトル | ||||||
タイトル | Tungsten-Surface-Structure Dependence of Sputtering Yield for a Noble Gas | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | binary collision approximation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | sputtering yield | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | fuzz structure | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | tungsten | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | argon | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | irradiation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | range | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | retention rate | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | surface structure | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
NAKAMURA, Hiroaki
× NAKAMURA, Hiroaki× SAITO, Seiki× ITO, Atsushi M.× TAKAYAMA, Arimichi |
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著者ID | ||||||
内容記述タイプ | Other | |||||
内容記述 | 0000-0002-0593-8810 | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Using the binary-collision approximation simulation with atomic collision in any structured target code AC∀T, we calculated sputtering yield, range, and retention rate for tungsten with a rough surface under argon atom irradiation. The simulation revealed the sputtering yield decreases and the retention rate increases as the surface becomes rougher. Because these quantities strongly depend on the surface, we suggest that it is necessary to consider the surface structure of the tungsten target when estimating the effects of walls. | |||||
書誌情報 |
Plasma and Fusion Research 巻 11, 号 Special Issue 1, p. 2401080, 発行日 2016-06-10 |
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書誌的事項 | ||||||
the 25th International Toki Conference on Creating the Future – Innovative Science of Plasma and Fusion – | ||||||
出版者 | ||||||
出版者 | The Japan Society of Plasma Science and Nuclear Fusion Research | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1880-6821 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12346675 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1585/pfr.11.2401080 | |||||
権利 | ||||||
権利情報 | (c) 2016 The Japan Society of Plasma Science and Nuclear Fusion Research | |||||
関連サイト | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1585/pfr.11.2401080 | |||||
関連名称 | Publisher version | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
NAIS | ||||||
10225 |