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True and Measured Outgassing Rates of a Vacuum Chamber with a Reversibly Absorbed Phase
http://hdl.handle.net/10655/3158
http://hdl.handle.net/10655/31580d0ce533-17aa-4d5a-9a7b-68ecec936fe2
Item type | 研究報告書 / Research Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2010-02-05 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | True and Measured Outgassing Rates of a Vacuum Chamber with a Reversibly Absorbed Phase | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | outgassing rate | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | outgassing equation | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | surface coverage | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | sticking probability | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | mean residence time | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | Temkin isotherm | |||||
キーワード | ||||||
言語 | en | |||||
主題Scheme | Other | |||||
主題 | 304 stainless steel chamber | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_18ws | |||||
資源タイプ | research report | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
"Akaishi, K.
× "Akaishi, K.× Nakasuga, M.× Funato, Y." |
|||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | "A pump down model for a vacuum chamber with a reversibly absorbed phase is presented. The outgassing equation which predicts the variation of coverage at the wall surface of a vacuum chamber with time is derived. Then the measured and the true outgassing rates are defined. The theoretical measured outgassing rate shows only a very weak dependence for pumping speed. This prediction is opposite to the experimental result that the measured outgassing rate depends significantly on pumping speed. It is discussed that thte experimental measured outgassing rate must be described as the product of the effective pumping speed and the measured pressure in the pumped chamber, in which the measured pressure is equivalent to the equilibrium pressure of the wall surface described by the equilibrium adsorption isotherm as a funcion of the shifted surface coverage theta - theta Delta by a asmall coverage theta Delta from the coverage of a pumping point theta." | |||||
書誌情報 |
en : Research Report NIFS-Series 発行日 2000-03-01 |
|||||
報告書番号 | ||||||
NIFS-628 | ||||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0915-633X |