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Extended Incident-Angle Dependence Formula of Sputter Yield
http://hdl.handle.net/10655/0002000051
http://hdl.handle.net/10655/000200005154ee28e6-5383-4eb9-8c17-ca9fad7e8b2e
名前 / ファイル | ライセンス | アクション |
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Item type | データ・データベース / Data or Dataset(1) | |||||||
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公開日 | 2023-09-28 | |||||||
タイトル | ||||||||
言語 | en | |||||||
タイトル | Extended Incident-Angle Dependence Formula of Sputter Yield | |||||||
言語 | ||||||||
言語 | eng | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | Sputtering | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | Erosion | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | Plasma-Materials Interaction | |||||||
キーワード | ||||||||
言語 | en | |||||||
主題Scheme | Other | |||||||
主題 | First Wall Materials | |||||||
資源タイプ | ||||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_ddb1 | |||||||
資源タイプ | dataset | |||||||
著者 |
ONO, Tadayoshi
× ONO, Tadayoshi× SHIBATA, K.× KENMOTSU, Takahiro× MURAMOTO, T.× LI C, Z.
× KAWAMURA, Takaichi |
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抄録 | ||||||||
内容記述タイプ | Abstract | |||||||
内容記述 | We extend a new semi-empirical formula for incident-angle dependence of normalized sputter yield that includes the contribution to sputter yield from the direct knock-out process that was not considered in the previously proposed one. Three parameters included in the new one are estimated for data calculated with ACAT code for D+ ions incident obliquely on C, Fe and W materials in incident-energy regions from several tens of eV to 10 keV. Then, the parameters are expressed with functions of incident energy. The formula with the functions derived well reproduces that using the ACAT data in the whole energy range. | |||||||
言語 | en | |||||||
書誌情報 |
en : Research Report NIFS-Series 発行日 2006-06 |
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報告書番号 | ||||||||
報告書番号 | NIFS-DATA-97 | |||||||
出版者 | ||||||||
言語 | en | |||||||
出版者 | National Institute for Fusion Science | |||||||
ISSN | ||||||||
収録物識別子タイプ | ISSN | |||||||
収録物識別子 | 0915-6364 |