@article{oai:nifs-repository.repo.nii.ac.jp:00003126, author = {"Ramos, Henry J. and Taniike, A. and Sasao, M. and Wada, M."}, journal = {Annual Report of National Institute for Fusion Science}, month = {2016-03-14}, title = {Development of Ion Source for Thin Film Formation}, volume = {Annual Report Apr.1995 - Mar.1996}, year = {} }