@article{oai:nifs-repository.repo.nii.ac.jp:00007802,
 author = {Shimpo,  F. and Hirokura,  S. and Adati,  K. and Toi,  K.},
 journal = {Annual Report of National Institute for Fusion Science},
 month = {2016-03-14},
 title = {Construction of RF Glow Discharge Cleaning System},
 volume = {Annual Report Apr.1994 - Mar.1995},
 year = {}
}