@article{oai:nifs-repository.repo.nii.ac.jp:00009324,
 author = {Uesugi,  Y. and Hanaoka,  E. and Tanaka,  Y. and Ohno,  N. and Tanaka,  M.},
 month = {2016-03-14},
 title = {High Efficiency RF Induction Plasma Generation},
 volume = {Annual Report Apr.2005 - Mar.2006},
 year = {}
}