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Characterization of He Induced Nanostructures Using SEM Image Analysis
http://hdl.handle.net/10655/00013257
http://hdl.handle.net/10655/000132579b3c7504-8f2f-4270-8cec-883bed08435e
名前 / ファイル | ライセンス | アクション |
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11891_PFR (2.2 MB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2022-06-22 | |||||
タイトル | ||||||
タイトル | Characterization of He Induced Nanostructures Using SEM Image Analysis | |||||
言語 | ||||||
言語 | eng | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | image analysis | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | statistical analysis | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | SEM | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | two-dimensional fast Fourier transform | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | probability density function | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | kurtosis | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Kullback-Leibler divergence | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | pinhole | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | fuzz | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
TANAKA, Hirohiko
× TANAKA, Hirohiko× KAJITA, Shin× OHNO, Noriyasu |
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著者ID | ||||||
内容記述タイプ | Other | |||||
内容記述 | 0000-0002-8025-008X | |||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Helium induced nanostructures on tungsten were characterized by applying basic statistical analysis techniques to scanning electron microscope (SEM) images. As the analysis targets, pinhole- and fuzz-dominant surfaces irradiated with different ion fluences were employed. Although two-dimensional Fourier analysis of the normalized brightness of SEM images clarified several characteristic features, their differences are small to distinguish the dominant nanostructures. On the other hand, probability density functions (PDFs) of the normalized brightness indicate that hole- and fuzz-dominant surfaces have long tail and Gaussian-like shape, respectively. By using several indexes with considering the black and white saturation, it was found that kurtosis and Kullback-Leibler divergence could provide reasonable judgement as the characterization index. | |||||
書誌情報 |
Plasma and Fusion Research 巻 14, 号 Special Issue 2, p. 3402049, 発行日 2019-04-10 |
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書誌的事項 | ||||||
the 27th International Toki Conference (ITC27) & the 13th Asia Pacific Plasma Theory Conference (APPTC2018) | ||||||
出版者 | ||||||
出版者 | The Japan Society of Plasma Science and Nuclear Fusion Research | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1880-6821 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AA12346675 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | 10.1585/pfr.14.3402049 | |||||
権利 | ||||||
権利情報 | (c) 2019 The Japan Society of Plasma Science and Nuclear Fusion Research | |||||
関連サイト | ||||||
識別子タイプ | DOI | |||||
関連識別子 | https://doi.org/10.1585/pfr.14.3402049 | |||||
関連名称 | Publisher version | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
NAIS | ||||||
11891 |